TOF-SIMS: Accurate mass scale calibration
Tóm tắt
Từ khóa
Tài liệu tham khảo
International Standards Organization www.iso.org.
Gilmore, I. S., Seah, M. P. VAMAS 2002: Static TOF SIMS Interlaboratory Study—Protocol for Analysis. NPL Report2001, COAM(A)6.
Niehuis E., 1990, SIMS VII, 299
Dahl, D. A. SIMION 3D, version 7.0; Idaho National Engineering and Environmental Laboratory.
Sigmund P., 1981, Sputtering by Particle Bombardment I, 37
Delcorte A., 2001, TOF-SIMS Surface Analysis by Mass Spectrometry, 161
ISO 22048:2004—Surface Chemical Analysis—Information format for Static SIMS.
