K.P. Daly1, W. D. Dozier1, J.F. Burch1, S.B. Coons1, R. Hu1, C. E. Platt1, R. W. Simon1
1TRW Space & Technology Group, One Space Park, Redondo Beach, California 90278
Tóm tắt
We have developed a technique which permits high-yield fabrication of microbridges and low noise YBa2Cu3O7 superconducting quantum interference devices (SQUIDs) in epitaxial thin films. These SQUIDs operate over a wide temperature range extending from 4 K to close to the superconducting transition temperature. Measurements of an rf SQUID operating at 77 K give a peak-to-peak flux sensitivity of 36 μV/Φ0 and a flux noise at 10 Hz of 1.5× 10−4 Φ0/√Hz. Device yields over 80% have been obtained.