Structure and optical properties of heterostructures based on MOCVD (Al x Ga1 − x As1 − y P y )1 − z Si z alloys

Semiconductors - Tập 48 - Trang 21-29 - 2014
Alloys P. V. Seredin1, A. V. Glotov1, A. S. Lenshin1, I. N. Arsentyev2, D. A. Vinokurov3, Tatiana Prutskij4, Harald Leiste5, Monica Rinke5
1Voronezh State University, Voronezh, Russia
2Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia
3Ioffe Physical-Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia
4Instituto de Ciencias, Benemérita Universidad Autónoma de Puebla, Puebla, Mexico
5Karlsruhe Nano Micro Facility, Eggenstein-Leopoldshafen, Germany

Tóm tắt

Epitaxial heterostructures produced by MOCVD on the basis of Al x Ga1 − x As ternary alloys with the composition parameter x ≈ 0.20–0.50 and doped to a high Si and P atomic content are studied. Using the high-resolution X-ray diffraction technique, scanning electron microscopy, X-ray microanalysis, Raman spectroscopy, and photoluminescence spectroscopy, it is shown that the epitaxial films grown by MOCVD are formed of five-component (Al x Ga1 − x As1 − y P y )1 − z Si z alloys.

Tài liệu tham khảo

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