Stresses near the Edges of a Square Silicon Membrane
Tóm tắt
The finite-element method (FEM) is used to calculate stresses in a square silicon pressure-sensing element. The stresses near the edges of the membrane are calculated and measured. Close agreement is achieved between the FEM predictions and experimental results. An empirical formula is constructed for the longitudinal component of stress at points outside the membrane. It is established that the normal component of stress should be considered when designing pressure sensors for use at applied pressures above 107 Pa.
Tài liệu tham khảo
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