Stable breakdown characteristics of 600 V LDMOS by extended P-bottom region

S.L. Kim1, C.K. Jeon1, J.J. Kim1, Y.S. Choi1, M.H. Kim1, H.S. Kang1, C.S. Song1
1New Technology Development Team, Fairchild Semiconductor Corporation, Puchon, Gyeonggi, South Korea

Tóm tắt

A new LDMOS promising stable hard breakdown characteristics by releasing the crowded electric field at the gate oxide edge is proposed. Extending P-bottom into the n-drift region can stabilize the breakdown characteristics of LDMOS. The numerical calculations and experimental results have shown that a stable breakdown voltage of over 600 V can be obtained when enclosed P-bottom width to P-well is 10 /spl mu/m and a P-top dose of 1/spl times/10/sup 12/ cm/sup -2/ is used.

Từ khóa

#Electric breakdown #Breakdown voltage #Avalanche breakdown #Switches #Semiconductor device breakdown #Batteries #AC-DC power converters #Power supplies #Charge carrier processes #Acceleration

Tài liệu tham khảo

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