Soft lithographic fabrication of an image sensor array on a curved substrate

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena - Tập 22 Số 5 - Trang 2548-2551 - 2004
Michael H.‐C. Jin1, John R. Abelson1, Martin K. Erhardt2, Ralph G. Nuzzo2
1Department of Materials Science and Engineering and the Seitz Materials Research Laboratory , University of Illinois, 1-109 ESB, 1101 W. Springfield Avenue, Urbana, Illinois 61801
2Department of Chemistry and the Seitz Materials Research Laboratory , 1-109 ESB, 1101 W. Springfield Avenue, University of Illinois, Urbana, Illinois 61801

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

Tập 22 Số 5

2548-2551

Thông tin tác giả