Single-chip CMOS capacitive gas sensor for detection of volatile organic compounds

SENSORS, 2002 IEEE - Tập 2 - Trang 1428-1431 vol.2
C. Hagleitner1, A. Hierlemann1, H. Baltes1
1ETH Zurich, Physical Electronics Laboratory, Switzerland

Tóm tắt

We present interface circuitry for a novel CMOS gas detection system based on a capacitive microsensor for the detection of airborne volatile organic compounds (VOCs). The system achieves an accuracy more than 18 bits at a bandwidth of 0.7 Hz, which corresponds to a detection limit of, e.g., 2 ppm for ethanol. The system does not any need accurate external voltage or current references and includes a serial interface (I/sup 2/C-bus) to set the parameters and transmit the acquired data to an external data processing unit.

Từ khóa

#Gas detectors #Volatile organic compounds #Polymers #Electrodes #Capacitors #CMOS process #Laboratories #Absorption #Equivalent circuits #Microsensors

Tài liệu tham khảo

malcovati, 1996, CMOS thermoelectric sensor interfaces 10.1007/978-3-662-03838-3_22 koll, 1999, CMOS Capacitive chemical microsystems for volatile organic compounds harsanyi, 1995, Polymer Films in Sensor Applications