Silicon pressure transducers with frequency output on base strain sensitive unijunction transistors

SENSORS, 2002 IEEE - Tập 2 - Trang 998-1001 vol.2
G.G. Babichev1, S.I. Kozlovskiy1, V.A. Romanov1, N.N. Sharan2
1Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Kiev, Ukraine
2Radio Electronics Research and Development Centre, Vinnitsa, Ukraine

Tóm tắt

Silicon pressure transducers with frequency output are simulated and designed The sensitive elements of the transducers are strain sensitive unijunction transistors. Two types of strain sensitive unijunction transistors are investigated: simple unijunction transistor (or double-base diode) and unijunction transistor with controlling p-n-junction. The transistors are classed as stress-sensitive semiconductor lateral bipolar devices with an S-type input (emitter) I-V characteristics. Using Fourier method and Green's function formalism the optimal layout of the devices and their basic parameters are determined. The devices can serve as a basis for designing pressure sensors with physically integrated function of mechanical stress-to-signal frequency conversion at the output.

Từ khóa

#Silicon #Transducers #Frequency #Capacitive sensors #Anisotropic magnetoresistance #Physics #Semiconductor diodes #Magnetic anisotropy #Perpendicular magnetic anisotropy #Charge carrier processes

Tài liệu tham khảo

10.1109/PROC.1986.13597 10.1134/1.1470591 babichev, 1992, Investigation of a bipolar two-collector strain-sensitive transistor with an accelerating electric field in the base, Sov Phys Semicond, 26, 694 vikulin, 1983, Galvanomagnetic devices Radio i sviaz Moscow babichev, 1994, Effect of silicon pressure sensor housing on sensitivity and its temperature dependence, J Techn Phys, 64, 89