Sensor properties of planar waveguide structures with grating couplers
Tóm tắt
The paper presents the results of theoretical analysis as well as the results of experimental research involving planar sensor structures with input grating couplers of the period Λ = 800 nm. In the theoretical part of the paper we discussed the influence of the parameters of a sensor structure on it sensitivities. The experimental part of the work presents the results of experimental research involving the influence of refractive index of the cover on the coupling characteristics of sensor structures with grating couplers. The full widths at half maximum (FWHM) were from 0.023° to 0.029°. For the investigated structures we estimated detection thresholds for the changes of refractive index of the cover and the changes of sensitive film thickness. It has been demonstrated that by the application of the elaborated structures we can detect minimal changes of the refractive index (Δnc)min = 2.1×10−6 when the refractive index of the cover nc = 1.333 and (Δnc)min = 1.0×10−6 when nc = 1515. For sensitive films of the thickness w < 100 nm, by using the elaborated structures, we can detect mean changes of the thickness along the values lower than 10−3 nm.
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Tài liệu tham khảo
Wiki, 2001, Compact inte - grated optical sensor system, Biosensors Bioelectronics, 16, 37, 10.1016/S0956-5663(00)00131-7
Karasiæski, 2005, Influence of technological parameters on the properties of sol - gel silica films, Opt Appl, 35, 117
Lukosz, 1983, Embossing technique for fabricating integrated optical components in hard inorganic waveguiding materials Optics, Lett, 8, 537
Heuberger, 1986, Embossing technique for fabricating surface relief gratings on hard oxide wavegui - des, Appl Opt, 25, 1499, 10.1364/AO.25.001499
Kunz, 1993, Gradient effective index waveguide sensors Actuators, Sensors, 11, 167
Szendrı, 2001, Art and practice to emboss gratings into sol - gel waveguides, Proc SPIE, 4284
Nellen, 1990, Integrated input grating cou - pler as chemo - and immunosensors Actuators, Sensors, 1
Strawbridge, 1986, The factors affecting the thickness of sol - gel derived silica coatings prepared by dip - ping, Cryst Solids, 86, 381, 10.1016/0022-3093(86)90026-8
Tiefenthaler, 1984, Integrated optical switches and gas sensors Optics, Lett, 10, 137
Karasiæski, 2004, Dielectric layers SiO TiO produced using the sol - gel technology for the application in planar sensors Opto no Sol - gel derived optical waveguide films for planar sensors with phase modulation, Proc SPIE Electron Rev Opt Appl, 15, 5576
Brinker, 1991, Fun - damentals of sol - gel dip coating Thin Solid, Films, 201
Walczak, 2002, Tuned liguid crystalline interferometer analysis by means of generalised Berreman matrix Opto, Electron Rev, 10, 69
Tiefenthaler, 1989, Sensitivity of grating cou - plers as integrated - optical chemical sensors, Opt Soc Am B, 6, 209, 10.1364/JOSAB.6.000209
Abdulhalim, 2006, Anisotropic layers in waveguides for mode tuning and tunable filtering, Proc SPIE, 6135
Karasiæski, 2002, Influence of waveguide s parameters on the sensitivity of planar sensors with difference interference, Opt Appl, 32, 776
Abdulhalim, 1999, Analytic propagation matrix method for lin - ear optics of arbitrary bioaxial layered media Pure, Opt Appl Opt, 1, 646, 10.1088/1464-4258/1/5/311
Vassell, 1974, Structure of optical guided modes in planar multilayers of optical anisotropic material, Opt Soc Amer, 64, 166, 10.1364/JOSA.64.000166
Berreman, 1972, Optics in stratified and anisotropic media : matrix formulation, Opt Soc Am, 62, 502, 10.1364/JOSA.62.000502
Kunz, 1996, Finite grating depth effects for integrated optical sensors with high sensi - tivity, Bios Bioelectronics, 11, 653, 10.1016/0956-5663(96)83299-4
Lukosz, 1995, Integrated optical chemical and direct bio - chemical sensors Actuators, Sensors, 29