Sensitivity enhancement of capacitive-type photoresistor-based humidity sensors using deliquescent salt diffusion method

Rittersma, 2002, Recent achievements in miniaturised humidity sensors—a review of transduction techniques, Sens. Actuator A, 96, 196, 10.1016/S0924-4247(01)00788-9 Lee, 2005, Humidity sensors: a review, Sens. Lett., 3, 1, 10.1166/sl.2005.001 Chen, 2005, Humidity sensors: a review of materials and mechanisms, Sens. Lett., 3, 274, 10.1166/sl.2005.045 Kang, 2000, A high-speed capacitive humidity sensor with on-chip thermal reset, IEEE Trans. Electron Devices, 47, 702, 10.1109/16.830983 Korvink, 1993, Accurate 3D capacitance evaluation in integrated capacitive humidity sensors, Sens. Mater., 4, 323 Matsuguchi, 1996, Effect of the degree of cross-linking on the characteristics of a PVCA capacitive-type humidity sensor, Sens. Actuator B, 34, 349, 10.1016/S0925-4005(96)01826-6 Matsuguch, 1998, Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films, Sens. Actuator B, 52, 53, 10.1016/S0925-4005(98)00255-X Takeda, 1999, Electrode structure and heat treatment effects on stabilization of capacitive humidity sensor with plasma-polymerized thin film, Jpn. J. Appl. Phys., 1, 909, 10.1143/JJAP.38.909 Kraus, 2003, Plasmapolymerized silicon organic thin films from HMDSN for capacitive humidity sensors, Sens. Actuator B, 88, 300, 10.1016/S0925-4005(02)00373-8 Su, 2005, A resistive-type humidity sensor using composite films prepared from poly(2-acrylamido-2-methylpropane sulfonate) and dispersed organic silicon sol, Talanta, 66, 1247, 10.1016/j.talanta.2005.01.039 Su, 2005, Humidity sensing and electrical properties of a composite material of SiO2 and poly-[3-(methacrylamino)propyl] trimethyl ammonium chloride, Sens. Actuator B, 105, 170, 10.1016/S0925-4005(04)00416-2 Su, 2005, In situ copolymerization of copolymer of methyl methacrylate and [3-(methacrylamino)propyl] trimethyl ammonium chloride on an alumina substrate for humidity, Sens. Actuator B, 107, 317, 10.1016/j.snb.2004.10.018 Cho, 2006, Fabrication of capacitive-type humidity sensor with poly(p-phenylene ether sulfone), Polym-Korea, 30, 207 Ducere, 2005, A capacitive humidity sensor using cross-linked cellulose acetate butyrate, Sens. Actuator B, 106, 331, 10.1016/j.snb.2004.08.028 Su, 2004, Humidity sensing and electrical properties of a composite nano-sized SiO2 and poly(2-acrylamido-2-methylpropane sulfonate), Sens. Actuator B, 100, 417, 10.1016/j.snb.2004.02.011 Su, 2006, Novel low humidity sensor made of TiO2 nanowires/poly(2-acrylamido-2-methylpropane sulfonate) composite material film combined with quartz crystal microbalance, Talanta, 69, 946, 10.1016/j.talanta.2005.11.039 Vossmeyer, 2002, Gold nanoparticle/polyphenylene dendrimer composite films: preparation and vapor-sensing properties, Adv. Mater., 14, 238, 10.1002/1521-4095(20020205)14:3<238::AID-ADMA238>3.0.CO;2-# Luechinger, 2007, Highly sensitive optical detection of humidity on polymer/metal nanoparticle hybrid films, Langmuir, 23, 3473, 10.1021/la062424y Su, 2006, A low humidity sensor made of quartz crystal microbalance coated with multi-walled carbon nanotubes/Nafion composite material films, Sens. Actuator B, 115, 338, 10.1016/j.snb.2005.09.019 Su, 2006, Humidity sensor based on PMMA simultaneously doped with two different salts, Sens. Actuator B, 113, 883, 10.1016/j.snb.2005.03.052 Greenspan, 1977, Humidity fixed points of binary saturated aqueous solutions, J. Res. Nat. Bureau Stand. A: Phys. Chem., 81A, 89, 10.6028/jres.081A.011 Su, 2006, A micromachined resistive-type humidity sensor with a composite material as sensitive film, Sens. Actuator B, 113, 837, 10.1016/j.snb.2005.03.109 Hernandez-Ramirez, 2007, High response and stability in CO and humidity measures using a single SnO2 nanowire, Sens. Actuator B, 121, 3, 10.1016/j.snb.2006.09.015 Casalbore-Miceli, 2004, Effect of the doping level on the conductance of polymer-salts complexes in the presence of humidity, Sens. Actuator B, 97, 362, 10.1016/j.snb.2003.09.013 Camaioni, 2001, Ion conductivity in poly(p-diethynylbenzene-co-propargyl alcohol) films doped with iron trichloride: dependence on temperature, Solid State Ionics, 144, 355, 10.1016/S0167-2738(01)00981-X