Semiconductor detectors and focal plane arrays for far-infrared imaging

Opto-Electronics Review - Tập 21 Số 4 - 2013
Antoni Rogalski1
1Institute of Applied Physics, Military University of Technology, 2 Kaliskiego Str., 00-908, Warsaw, Poland

Tóm tắt

AbstractThe detection of far-infrared (far-IR) and sub-mm-wave radiation is resistant to the commonly employed techniques in the neighbouring microwave and IR frequency bands. In this wavelength detection range the use of solid state detectors has been hampered for the reasons of transit time of charge carriers being larger than the time of one oscillation period of radiation. Also the energy of radiation quanta is substantially smaller than the thermal energy at room temperature and even liquid nitrogen temperature. The realization of terahertz (THz) emitters and receivers is a challenge because the frequencies are too high for conventional electronics and the photon energies are too small for classical optics.Development of semiconductor focal plane arrays started in seventies last century and has revolutionized imaging systems in the next decades. This paper presents progress in far-IR and sub-mm-wave semiconductor detector technology of focal plane arrays during the past twenty years. Special attention is given on recent progress in the detector technologies for real-time uncooled THz focal plane arrays such as Schottky barrier arrays, field-effect transistor detectors, and microbolometers. Also cryogenically cooled silicon and germanium extrinsic photoconductor arrays, and semiconductor bolometer arrays are considered.

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Tài liệu tham khảo

Rieke, 2007, Infrared detector arrays for astronomy, Annu Rev Astrophys, 68, 77, 10.1146/annurev.astro.44.051905.092436

Rollin, 1952, Long wavelength infrared photoconductivity of silicon at low temperatures, Proc Phys Soc, 43, 995, 10.1088/0370-1301/65/12/115

Dragoman, 2004, Terahertz fields and appli cations, Prog Quant Electron, 6, 1, 10.1016/S0079-6727(03)00058-2

Woodcraft, 2004, Hopping conduction in NTD germanium : comparison be tween measurement and theory Low, Temp Phys, 64, 925, 10.1023/B:JOLT.0000013209.08494.01

Becklake, 1970, Submillimetre performance of diode detectors using Ge Si and GaAs, Phys D Appl Phys, 32, 473, 10.1088/0022-3727/3/4/306

Sizov, 2010, THz detectors Quantum, Prog Electron, 11, 278, 10.1016/j.pquantelec.2010.06.002

Hogue, 2010, Update on blocked impurity band detector technology from DRS SPIE, Proc, 59, 7780

Richards, 1994, Bolometers for infrared and millimeter wa ves, Appl Phys, 63, 1, 10.1063/1.357128

February, 2004, emerging technologies that will change your world Technology, Rev, 8

Poglitsch, 2008, Feu chtgruber van Hoof denbussche The Photodetector Array Camera and Spec trometer for the Herschel Space Laboratory SPIE, Proc, 51, 7010

Ueda, 2013, Temperature depend ence of novel single photon detectors in the long wavelength Semiconductor detectors and focal plane arrays for far infrared imaging no Warsaw infrared range Infrared Milli Terahz Waves s, Electron Rev, 14, 10762

Tauk, 2006, Fenouil let Beranger Plasma wave detection of terahertz radiation by silicon field effects transistors : Responsivity and noise equivalent power, Appl Phys Lett, 23, 253511, 10.1063/1.2410215

62, 2004, Pyroelectric Detector Product Sheet forModel SPH Spectrum Detector Inc Lake Oswego OR www spectrum detector com Superconducting detec tors and mixers for millimeter and submillimeter astrophys ics, Proc IEEE, 30, 92

Sizov, 2010, THz radiation sensors Opto, Electron Rev, 10, 10

Burstein, Infrared photo conductivity due to neutral impurities in silicon, Phys Rev, 44

Hadi, 2012, Al k pixel video camera for terahertz imaging applica tions in nm CMOS Solid State Circuits, IEEE, 25, 0

Leotin, 1986, Far infrared photoconductive detectors SPIE, Proc, 45, 666

Ham, 2011, GHz diode detector in nm digital CMOS Solid State Circuits, IEEE, 18, 130

Oda, 2010, Uncooled bolometer type terahertz focal plane ar ray and camera for real time imaging Comptes Rendus, Physique, 26, 496, 10.1016/j.crhy.2010.05.001

Ratches, 2006, Current and future trends in military night vi sion applications, Ferroelectrics, 15, 342

Bandaru, 2002, Growth and per formance of Ge : Sb blocked impurity band ( BIB ) detectors SPIE, Proc, 61, 4486

Dobrovolsky, 2010, sub THz bolometer based on the electron heating in a semiconductor wave guide Opto, Electron Rev, 42, 250

Wang, 1986, and Optical efficiency of far infrared photoconduc tors, Appl Opt, 47, 4127, 10.1364/AO.25.004127

Crowe, 2005, and Opening the terahertz window with integrated diode circuits Solid State Circuits, IEEE, 5, 2104

Wei, 2008, Ultrasensitive hot electron nanobolometers for terahertz astrophysics Nature Nano, technol, 7, 496

Agnese, 1999, Herschel Space Observatory http herschel jpl nasa gov / spireInstrument shtml New technological development for far infrared bolometer arrays SPIE, Proc, 65, 3698

Nguyen, 2012, Ouvrier Buffet Broadband THz uncooled antenna cou pled microbolometer array electromagnetic design simula tions and measurements on Terahertz Science and Technology, IEEE, 27, 299

Knap, 2004, Lusakow ski and Plasma wave detection of sub terahertz and tera hertz radiation by silicon field effect transistors, Appl Phys Lett, 38, 675, 10.1063/1.1775034

Kazanskii, 1977, Far infra red photoconductivity of uniaxially stressed germanium Opto no Ga pho toconductors in low infrared backgrounds, Appl Phys Lett Electron Rev Appl Phys Lett, 48, 496

Farhoomand, 2008, http fifi ls mpg garching mpg dr detector html http pacs mpe mpg de html Viability of layered hybrid architecture for far IR focal plane arrays In frared Phys, Techn, 52, 152

Hesler, Responsivity and noise mea surements of zero bias Schottky diode detectors in, Proc, 20

Brown, 2006, and High sensitivity quasi optically coupled semimetal semiconductor detectors at GHz in SPIE, Proc, 21, 6212

Corcos, 2011, The TeraMOS sensor for monolithic passive THz imagers in Microwaves Com munications Antennas and Electronic Systems Tel Aviv, IEEE Int Confer, 40

Phillips, 1973, A low temperature bolome ter heterodyne receiver for millimeter wave astronomy, Rev Sci Instrum, 69, 1009, 10.1063/1.1686288

Haller, 1994, Advanced far infrared detectors Infrared, Phys Techol, 46, 127, 10.1016/1350-4495(94)90074-4

Norton, 1991, Infrared image sensors, Opt Eng, 58, 1649, 10.1117/12.56001

Dyakonov, 1993, Shallow water analogy for a ballistic field effect transistor : new mechanism of plasma wave generation by the dc current, Phys Rev Lett, 36, 2465, 10.1103/PhysRevLett.71.2465

Chattopadhyay, 2008, Submillimeter wave coherent and inco herent sensors for space applications in : Advance ments in Modelling Design Issues Fabrication and Practi cal Applications pp edited by Mukhopad hyay and Springer New York, Sensors, 4, 387, 10.1007/978-3-540-69033-7_19

Young, 1965, Millimeter frequency conver sion using Au n type GaAs Schottky barrier epitaxial diodes with a novel contacting technique, Proc IEEE, 33, 2130, 10.1109/PROC.1965.4511

Putley, 1977, InSb submilimeter photoconductive detectors in Semiconductors and Semimetals pp ed ited by Academic Press New York, Vol, 70, 143

Kohin, 2004, Performance limits of uncooled VOx microbolometer focal plane arrays SPIE, Proc, 16, 5406