Selective NO/sub 2/ gas sensing characteristics of sol-gel prepared MoO/sub 3/-WO/sub 3/ thin films
COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices - Trang 359-362
Tóm tắt
Molybdenum trioxide - tungsten trioxide (MoO/sub 3/-WO/sub 3/) binary metal oxide thin films have been prepared by the sol-gel process. The films were deposited using the spin coating technique onto alumina substrates with interdigital electrodes and single crystal silicon substrates for electrical and micro characterization. Scanning Electron Microscopy (SEM) showed MoO/sub 3/-WO/sub 3/ film morphology composed of MoO/sub 3/ needle like grains and WO/sub 3/ spherical grains when annealed at 450/spl deg/C. The films exhibited selective gas sensing characteristics at an operating temperature of 300/spl deg/C towards nitrogen dioxide (NO/sub 2/).
Từ khóa
#Substrates #Scanning electron microscopy #Tungsten #Transistors #Semiconductor films #Coatings #Electrodes #Silicon #Morphology #NeedlesTài liệu tham khảo
galatsis, 2000, Sol-gel prepared MoO<subscript>3</subscript>-TiO<subscript>2</subscript> Thin Films for Gas Sensing, Proc 8th Int Meeting Chemical Sensors
galatsis, 2000, Semiconductor of MoO<subscript>3</subscript>-TiO<subscript>2</subscript> Thin Film Gas Sensor, Proc 8th Int Meeting Chemical Sensors
li, 2000, Microstructure Characterization of MoO<subscript>3</subscript>-TiO<subscript>2</subscript> Nanocomposite Thin Films for Gas Sensing, Proc 8th Int Meeting Chemical Sensors
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