Raman bands in microwave plasma assisted chemical vapour deposited films

Microelectronics Journal - Tập 34 - Trang 1075-1077 - 2003
M. Kadlečı́ková1, J. Breza1, M. Veselý1, Z. Frgala2, V. Kudrle2, J. Janča2, J. Janı́k1, J. Buršı́k3
1Department of Microelectronics, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Ilkovičova 3, Bratislava 812 19, Slovak Republic
2Department of Physical Electronics, Faculty of Sciences, Masaryk University, Kotlářská 2, Brno 611 37, Czech Republic
3Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, Brno 616 62, Czech Republic

Tài liệu tham khảo

Knight, 1998, Characterization of diamond films by Raman spectroscopy, J. Mater. Res., 4, 385, 10.1557/JMR.1989.0385 Bühlmann, 1999, Characterization of ballas diamond depositions, Diamond Relat. Mater., 8, 194, 10.1016/S0925-9635(98)00258-1 Prawer, 2000, The Raman spectrum of nanocrystalline diamond, Chem. Phys. Lett., 332, 93, 10.1016/S0009-2614(00)01236-7 Roy, 2002, Ag nanoparticle induced surface enhanced Raman spectroscopy of chemical vapor deposition diamond thin films prepared by hot filament chemical vapor deposition, J. Appl. Phys., 91, 6085, 10.1063/1.1469206 A. Kromka, J. Breza, M. Kadlečı́ková, J. Janı́k, F. Balon, Identification of carbon phases and analysis of diamond/substrate interfaces by Raman spectroscopy, to appear in Materials Characterization. 2001
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Thông tin xuất bản

Microelectronics Journal

Tập 34

1075-1077

Thông tin tác giả