Quantitative depth profiling in surface analysis: A review

Surface and Interface Analysis - Tập 2 Số 4 - Trang 148-160 - 1980
S. Hofmann1
1Max Planck Institut für Metallforschung, Institut für Werkstoffwissenschaften, Seestrasse 92, D-7000 Stuttgart 1, FRG

Tóm tắt

AbstractAfter a brief survey of the various non‐destructive and destructive methods used for obtaining in‐depth composition profiles, the generally applicable method of ion sputtering in combination with a surface analysis technique is discussed in more detail. The quantitative evaluation of sputtering profiles requires the conversion of a measured signal intensity versus sputtering time into a true concentration versus distance from the original surface. Basically, this procedure comprises the quantification of the surface analysis method applied and the sputtering rate, both being dependent on sample composition. Furthermore, various phenomena limit the quantitative evaluation of depth profiles; the most important of which are ion and/or electron beam induced changes of surface composition and surface microtopography. Different factors such as information depth, ion beam inhomogeneity, original and beam induced roughness, knock‐on and atomic mixing effects, preferential sputtering, enhanced atomic migration etc. are discussed with respect to their influence on depth resolution and its dependence on sputter depth. Model calculations and their comparison with experimental data reveal the influence of these factors. In conclusion, the basic requirements for the optimization of sputter profiling are stated.

Từ khóa


Tài liệu tham khảo

10.1016/0040-6090(76)90620-9

10.1016/0039-9140(79)80171-X

10.1016/0368-2048(78)80005-X

10.1016/B978-0-12-173850-1.50008-9

Maier K., 1979, Mikrochim. Acta Suppl., 8, 125

10.1016/B978-0-444-41344-4.50008-2

10.1002/pssb.2220780230

10.1080/10408437308245843

10.1007/BF00901910

H. W.Werner inElectron and Ion Spectroscopy of Solids (edited by L. Fiermans J. Vennik and W. Dekeyser) p.324. New York (1978).

10.1007/BF00896610

10.1016/0040-6090(79)90319-5

10.1016/0039-6028(79)90258-9

10.1021/ac60328a037

10.1016/0040-6090(79)90190-1

Kempf J., 1979, SIMS II, 97

Werner H. W., 1976, Acta Electron., 19, 53

10.1016/0378-5963(79)90024-2

J. M.Morabito paper presented at the International Conference on Quantitative Surface Analysis Teddington October1979 to be published inSurf. Interface Anal.

10.1080/10408437808243617

M. P.Seah paper presented at the International Conference on Quantitative Surface Analysis Teddington October1979 to be published inSurf. Interface Anal.

10.1002/sia.740020205

10.1002/sia.740020403

10.1016/0020-7381(78)80005-9

Newbury D. E., 1979, Mikrochim. Acta Suppl., 8, 3

10.1063/1.1653948

10.1016/0039-6028(74)90132-0

10.1016/0039-6028(76)90243-0

10.1007/BF00882890

10.1016/0368-2048(75)80062-4

Ebel M. F., 1979, Mikrochim. Acta Suppl., 8, 115

10.1007/BF00883758

10.1002/sia.740010103

10.1088/0022-3727/7/1/323

Palmberg P. W., 1973, Anal. Chem., 45, 549

10.1016/0039-6028(72)90196-3

Hofmann S., 1979, Mikrochim. Acta Suppl., 8, 71

S.Hofmann Le Vide—Les Couches Minces No. spécial 259(March1979).

Hofmann S., 1977, Proceedings of the 7th International Vacuum Congress and 3rd International Conference on Solid Surfaces, 2613

10.1016/0039-6028(76)90366-6

H.GoretzkiandS.Hofmann unpublished.

Reuter W., 1972, Proceedings of the 6th International Conference on X‐ray Optics and Microanalysis, 121

M.Schrader Thesis Stuttgart (1979);

1979, Mikrochim. Acta Suppl., 8, 377

10.1021/ac60314a038

10.1016/0039-6028(69)90123-X

10.1016/0039-6028(77)90134-0

J.LeHèricy Le Vide—Les Couches Minces No. Spécial 307(March1979).

10.1016/0039-6028(76)90394-0

10.1016/0039-6028(78)90143-7

S.HofmannandJ. M.Sanz unpublished.

10.1016/0039-6028(78)90102-4

10.1016/0040-6090(77)90289-9

10.1007/BF00885122

10.1002/sia.740010107

R. E.HonigandC. W.Magee Proceedings of the 26th Annual Conference on Mass Spectrometry p.207. St. Louis (1978).

Landolt D., 1980, Oberfiaeche Surf., 21, 1

10.1007/BF00882481

10.1063/1.1655242

10.1016/0040-6090(79)90150-0

10.1063/1.322025

10.1007/BF00898370

10.1063/1.323047

10.1016/B978-0-08-023049-8.50068-3

10.1007/BF00896140

10.1007/BF00915203

10.1007/978-3-7091-3724-6_4

C. W.Magee unpublished (1978).

10.1063/1.90153

10.1063/1.1135438

10.1007/BF00882632

Mathieu H. J., 1977, Proceedings of the 7th International Vacuum Congress and 3rd International Conference on Solid Surfaces, 2023

H. J.MathieuandD.Landolt Le Vide—Les Couches Minces No. Spécial 273. (March1979).

10.1016/0029-554X(78)90862-5

E. M.BotnickandG. O.Fowler unpublished.

10.1002/sia.740020506

10.1016/0029-554X(80)91283-5

10.1016/0040-6090(76)90007-9

Hofmann S., 1979, Wilson and Wilson's Comprehensive Analytical Chemistry, 89

10.1007/BF01394486

10.1016/0039-6028(75)90030-8

10.1063/1.1660561

10.1016/0040-6090(78)90144-X

10.1007/BF00899698

Townsend P. D., 1976, Ion Implantation, Sputtering and their Applications

10.1080/00337577308232237

10.1016/0020-7381(73)80090-7

10.1016/0039-6028(79)90717-9

10.1080/00337577708233095

10.1002/sia.740020307

10.1007/BF00737856

10.1016/0368-2048(76)85004-9

10.1016/0368-2048(77)87008-4

10.1147/rd.223.0277

10.1016/0029-554X(80)91282-3

10.1063/1.325858

10.1116/1.1317770

10.1016/0039-6028(73)90428-7

10.1116/1.569056

Färber W., 1974, Vak. Tech., 23, 239

10.1016/0039-6028(80)90258-7

10.1016/0039-6028(75)90126-0

10.1016/0039-6028(76)90356-3

10.1016/0039-6028(76)90191-6

10.1063/1.88714

10.1016/0039-6028(80)90226-5

10.1063/1.1660158

10.1016/0079-6816(76)90001-0

10.1016/0368-2048(79)85017-3

10.1080/00337577508242047

10.1116/1.570088

10.1016/0039-6028(79)90366-2

10.1007/BF00883758

10.1143/JJAP.18.1987

10.1007/BF00934407

10.1016/0375-9601(79)90635-2

10.1016/0029-554X(80)91281-1

10.1063/1.90716

10.1116/1.569883

10.1016/0039-6028(76)90279-X

10.1080/00337577408232406

10.1002/sia.740020507

Peterson N. L., 1976, Radiation Damage in Metals

10.1016/0022-3115(78)90462-2

10.1116/1.568934

Weisweiler W., 1979, Mikrochim. Acta Suppl., 8, 475

10.1016/0025-5416(80)90010-5

10.1063/1.1734979

10.1007/BF02396643

10.1016/0040-6090(80)90202-3

10.1016/0040-6090(79)90135-4

10.1063/1.326433

K.Röll Appl. Surf. Sci. to be published.

10.1116/1.569046

10.1063/1.321871

J.Gandon Thesis Grenoble (1978).

10.1016/0039-6028(77)90424-1

10.1016/0036-9748(76)90311-2

Werner H. W., 1979, Mikrochim. Acta Suppl., 8, 25

10.1016/0039-6028(79)90643-5

10.1366/000370278774331468

10.1016/0378-5963(80)90122-1

Thông tin
Thông tin xuất bản

Surface and Interface Analysis

Tập 2 Số 4

148-160

Thông tin tác giả