Properties of TiO2‐based transparent conducting oxides

Physica Status Solidi (A) Applications and Materials Science - Tập 207 Số 7 - Trang 1529-1537 - 2010
Taro Hitosugi1, Naoomi Yamada2, Shoichiro Nakao2, Yasushi Hirose3, Tetsuya Hasegawa3
1Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, 980-8577 Sendai, Japan
2Kanagawa Academy of Science and Technology (KAST), 213‐0012 Kawasaki, Japan
3Department of Chemistry, University of Tokyo, 113‐0033 Tokyo, Japan

Tóm tắt

Abstract

The development and properties of titanium dioxide (TiO2)‐based transparent conducting oxides (TCO), which exhibit properties comparable to those of In2–xSnxO3 (ITO), are reviewed in this article. An epitaxial thin film of anatase Ti0.94Nb0.06O2 exhibited a resistivity (ρ) of 2.3 × 10−4 Ω cm and internal transmittance of ∼95% in the visible light region. Furthermore, we prepared polycrystalline films with ρ of 6.4 × 10−4 Ω cm at room temperature on glass substrates by using sputtering. We focus on characteristics unique to TiO2‐based TCO, such as a high refractive index, high transmittance in infrared, and high stability in reducing atmospheres. Possible applications of TiO2‐based TCOs, as well as the mechanism of the transparent conducting properties found in this d‐electron‐based TCO, are discussed in this review.

magnified image

Photograph showing TiO2‐based TCO on a transparent plastic film. Note that the film appears greenish due to interference in the film originating from its high refractive index. This high refractive index is one of the unique characteristics of TiO2‐based TCO.

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Physica Status Solidi (A) Applications and Materials Science

Tập 207 Số 7

1529-1537

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