Processing and properties of CVD diamond for thermal management

Sung‐Ho Jin1, H. Mavoori1
1Bell Laboratories, Lucent Technologies, 07974, Murray Hill, NJ

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F.P. Bundy, H.T. Hall, H.M. Strong and R.J. Wentorf, Nature 176, 51 (1955).

J.C. Angus, H.A. Will and W.S. Stanko, J. Appl. Phys. 39, 2915 (1968).

B.V. Spitsyn, L.L. Bouilov and B.V. Deryagin, J. Cryst. Growth 52, 219 (1981).

J.E. Graebner, S. Jin, G.W. Kammlott, J.A. Herb and C.F. Gardinier, Nature 359, 401 (1992).

M. Seal, The Properties of Natural and Synthetic Diamond, ed. J.E. Field, (New York: Academic Press, New York, 1992), Ch. 16, p. 607.

M.N. Yoder, Diamond and Diamond-like Films and Coatings, ed. R.E. Clausing et al., (New York: Plenum Press, 1991, p. 1.

S. Jin, J.E. Graebner, G.W. Kammlott, T.H. Tiefel, S.C. Kosinski, L. Chen and R.A. Fastnacht, Appl. Phys. Lett. 60, 1948 (1992).

S. Jin, J.E. Graebner, T.H. Tiefel, G.W. Kammlott and G.J. Zydzik, Diamond and Related Materials 1, 949 (1992).

S. Jin, J.E. Graebner, M. McCormack, T.H. Tiefel, A. Katz and W.C. Dautremont-Smith, Nature 362, 822 (1993).

S. Jin, L.H. Chen, J.E. Graebner, M. McCormack and M. Reiss, Appl. Phys. Lett. 63, 622 (1983).

S. Jin, W. Zhu and J.E. Graebner, Applications of Diamond Films and Related Materials, ed. A. Feldman, et al., (Gaithersburg, MD: NIST Special Publication 885, 1995), p. 209.

M. McCormack, S. Jin, J.E. Graebner, T.H. Tiefel and G.W. Kammlott, Diamond and Related Materials 3, 254 (1994).

Binary Alloy Phase Diagrams, ed. T.B. Massalski, 2nd Ed., (Metals Park, OH: ASM International, 1991), p. 843.

Binary Alloy Phase Diagrams, ed. T.B. Massalski, 2nd Ed., (Metals Park, OH: ASM International, 1991), p. 860.

Binary Alloy Phase Diagrams, ed. T.B. Massalski, 2nd Ed., (Metals Park, OH: ASM International, 1991), p. 834.

A. Katz, K.W. Wang, F.A. Baiocchi, W.C. Dautremont-Smith, E. Lane, H.S. Luftman, R.R. Varma and H. Curnan, Mater. Chemistry and Phys. 33, 281 (1993).

R. Schaefer, R. Eden and T. Moravec, Norton Diamond (private communication).