Plasma polymerization of carbosilanes: Tetramethylsilane as a model monomer for reactivity study of silylmethyl groups
Tóm tắt
Plasma polymerization of tetramethysilane was studied in terms of file reactivity of silylmethyl groups. Two different plasma experiments have been carried out. The first was involved in trapping of low-molecular-weight conversion products of file monomer, and the second was used for deposition of polymer film. Gas chromatograplty/ mass spectrometry examination of file trapped material correlated with infrared analysis of the polymer film revealed that silymethyl groups undergo a variety of plasma reactions producing Si-Si, Si-CH2-Si, Si-CH2-CH2-Si, SiHx and SiEt units. The identified low-molecular-freight products show that the formation of SiHx and Si-CH2-Si units are predominant plasma reactions q/ file silylmetlml groups.
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