Plasma-assisted syntheses of diamond films and nanotubes

Summary form only given, as follows. Experimental investigation of plasma-assisted syntheses of carbon based material, including diamond films and carbon nanotubes, has been carried out. The diamond films were deposited on silicon substrates using a hot filament device with an optional glow discharge capability. The optional glow discharge current was about 0.3 A. The substrate temperature was in the range 700-800/spl deg/C. The diamond films were grown at a pressure around 20 Torr in a vessel flushed with a mixture of hydrogen and methane gases.