Optical and electrical gas sensing properties of In/sub x/O/sub y/N/sub z/ films
SENSORS, 2002 IEEE - Tập 1 - Trang 623-626 vol.1
Tóm tắt
In this paper we describe the optical and electrical gas sensing properties of In/sub x/O/sub y/N/sub z/ films promoted by an ultra-thin gold overlayer. We have fabricated In/sub x/O/sub y/N/sub z/ films with a nanocrystalline porous structure by RF-sputtering in Ar/N/sub 2/ followed by an annealing process. Gold particles with 20-30 nm diameter on top of the In/sub x/O/sub y/N/sub z/ films have been formed by DC-sputtering followed by an annealing process. We have investigated the optical H/sub 2/ and NO/sub 2/ sensing properties (change of absorbance) and also the electrical sensing effect (change of electrical resistance) for these two gases. A combined optical/electrical sensor for H/sub 2//NO/sub 2/ is proposed.
Từ khóa
#Optical films #Optical sensors #Temperature sensors #Absorption #Wavelength measurement #Gold #Hydrogen #Temperature measurement #Fluid flow measurement #Temperature distributionTài liệu tham khảo
ando, 1997, Combined effects of small gold particles on the optical gas sensing by transition metal oxide films Catal Today, 36, 135
10.1039/ft9949001011
10.1016/S0925-4005(01)00799-7
10.1016/0925-4005(95)85187-9
10.1063/1.1725519
10.1016/S0925-4005(97)80121-9
10.1016/S0925-4005(01)00733-X
steffes, 2001, Optical and electrical hydrogen sensitivity of Inx Oy Nz films promoted by an ultrathin gold overlayer, Proc of the 8th Int Conf on Composites Engineering, 887
10.1016/S0925-4005(01)00561-5
steffes, 2000, Ti and Au surface modifications of In2O3 thin films for N2 sensing, CD-ROM Proc Eurosensors XIV Copen-hagen, 141
kobayashi, 1990, Optical detection of CO in air through catalytic chromism of metal-oxide thin films, Proc 3rd Int Meet Chemical Sensors, 318