Nonlinearity and hysteresis of resonant strain gauges

landau, 1964, Lehrbuch der Theoretischen Physik-Mechanik, 101

10.1007/BF01602658

timoshenko, 1974, Vibration Problems in Engineering, 177

den hartog, 1956, Mechanical Vibration, 370

10.1016/0924-4247(94)00812-4

10.1109/MEMSYS.1997.581881

10.1088/0960-1317/5/2/034

10.1109/SENSOR.1991.148838

10.1109/SENSOR.1991.148930

tilmans, 1992, micro resonant force gauges, Sens Actuators A, 30, 35, 10.1016/0924-4247(92)80194-8

shirley, 1993, frequency-pulling effects in amplitude-stiffened resonant sensors, Proc 7th Int Conf Solid-State Sensors and Actuators (Transducers 93), 458

tilmans, 1993, Micro-mechanical sensors using encapsulated built-in resonant strain gauges

elwenspoek, 1991, micromechanical resonant sensors, Journal A, 15

ikeda, 1989, study of nonlinear vibration silicon resonant beam strain gauges, Proc 8th Sensor Symp, 21

tilmans, 1994, electrostatically driven vacuum-encapsulated polysilicon resonators, part ii: theory and performance, Sens Actuators A, 45, 67, 10.1016/0924-4247(94)00813-2

10.1049/el:19870670