New thermoelectric components using microsystem technologies

Journal of Microelectromechanical Systems - Tập 13 Số 3 - Trang 414-420 - 2004
H. Böttner1, J. Nurnus1, Alexander Gavrikov1, Gerd Kühner1, Martin Jägle1, C. Kunzel1, D. Eberhard1, G. Plescher1, Axel Schubert2, K.-H. Schlereth3
1Fraunhofer Inst. Phys. Messtechnik, Freiburg, Germany
2Infineon Technologies, Munich, Germany
3[Osram Opto Semiconductors GmbH and Company, Regensburg, Germany]

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