NbNx thin film resistors for cryogenic application

A.R. Kerr, S.-K. Pan, Proceedings of the Seventh International Symposium on Space Terahertz Technology, Charlotteville; USA, September 12–14 1996, p. 207. Koshelets, 1996, 193 Wilson, 1999, IEEE Trans. Appl. Supercond., 9, 1724, 10.1109/77.784786 Knappe, 1997, J. Vac. Sci. Technol. A, 15, 2158, 10.1116/1.580528 Kerber, 1997, IEEE Trans. Appl. Supercond., 7, 2638, 10.1109/77.621781 Plathner, 1996, Appl. Phys. Lett., 69, 4102, 10.1063/1.117832 Stoney, 1909, Proc. Royal Soc., A 82, 172, 10.1098/rspa.1909.0021 A.N. Christensen, Acta Chemica Scandinavica, Series A (28) (1974). Treece, 1995, Phys. Rev. B Condens. Mat., 51, 9356, 10.1103/PhysRevB.51.9356 Christensen, 1978, Acta Chem. Scand. Ser., 32, 87, 10.3891/acta.chem.scand.32a-0087 Terao, 1971, J. Less-Common Met., 23, 159, 10.1016/0022-5088(71)90076-2 Christensen, 1976, Acta Chem. Scand. Ser., 30, 219, 10.3891/acta.chem.scand.30a-0219 Christensen, 1981, Acta Chem. Scand. Ser., 35, 111, 10.3891/acta.chem.scand.35a-0111 Kim, 1988, J. Less-Common Met., 143, 339, 10.1016/0022-5088(88)90056-2 Kim, 1990, J. Less-Common Met., 160, 193, 10.1016/0022-5088(90)90122-Z Tyutyunnik, 1998, Zeitschrift Naturforschung Teil B, 278, 83 Brauer, 1940, Z. Elektrochem., 46, 397 Brauer, 1952, Z. Anorg. Allg. Chem., 270, 160, 10.1002/zaac.19522700114 Fiala, JCPDS-International Centre for Diffraction Data, PCPDFWIN v. 2.02, 1973. Houmes, 1996, J. Solid State Chem., 127, 267, 10.1006/jssc.1996.0383