Nanolabyrinthine ZrAlN thin films by self-organization of interwoven single-crystal cubic and hexagonal phases

APL Materials - Tập 1 Số 2 - 2013
Naureen Ghafoor1, L.J.S. Johnson2, Dmitri O. Klenov3, Jelly Demeulemeester4, P. Desjardins4, I. Petrov5,6, Lars Hultman2, Magnus Odén1
1Linköping University 1 Nanostructured Materials, Department of Physics, Chemistry, and Biology (IFM), , Linköping SE-581 83, Sweden
2Linköping University 2 Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), , Linköping SE-581 83, Sweden
3FEI Company 3 , Building AAE, Achtseweg Noord 5, Eindhoven, The Netherlands
4École Polytechnique de Montréal 4 Département de Génie Physique and Regroupement Québécois sur les Matériaux de Pointe (RQMP), , Case Postale 6079, Succursale Centre-ville, Montréal, Québec H3C 3A7, Canada
5Materials Science Department, and Frederick Seitz Materials Research Laboratory, University of Illinois, 104 S. Goodwin Avenue, Urbana, Illinois 61801, USA
6University of Illinois 5 Materials Science Department, and Frederick Seitz Materials Research Laboratory, , 104 S. Goodwin Avenue, Urbana, Illinois 61801, USA

Tóm tắt

Self-organization on the nanometer scale is a trend in materials research. Thermodynamic driving forces may, for example, yield chessboard patterns in metal alloys [Y. Ni and A. G. Khachaturyan, Nature Mater. 8, 410–414 (2009)]10.1038/nmat2431 or nitrides [P. H. Mayrhofer, A. Hörling, L. Karlsson, J. Sjölén, T. Larsson, and C. Mitterer, Appl. Phys. Lett. 83, 2049 (2003)]10.1063/1.1608464 during spinodal decomposition. Here, we explore the ZrN-AlN system, which has one of the largest positive enthalpies of mixing among the transition metal aluminum nitrides [D. Holec, R. Rachbauer, L. Chen, L. Wang, D. Luefa, and P. H. Mayrhofer, Surf. Coat. Technol. 206, 1698–1704 (2011)10.1016/j.surfcoat.2011.09.019; B. Alling, A. Karimi, and I. Abrikosov, Surf. Coat. Technol. 203, 883–886 (2008)]10.1016/j.surfcoat.2008.08.027. Surprisingly, a highly regular superhard (36 GPa) two-dimensional nanolabyrinthine structure of two intergrown single crystal phases evolves during magnetron sputter thin film synthesis of Zr0.64Al0.36N/MgO(001). The self-organization is surface driven and the synergistic result of kinetic limitations, where the enthalpy reduction balances both investments in interfacial and elastic energies.

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