Motion dynamics sensing scheme for MEMS micro-motor
SENSORS, 2002 IEEE - Tập 2 - Trang 1046-1051 vol.2
Tóm tắt
A direct sense method for MEMS micro-motors is described which enables design, reliability and inspection engineers to quickly evaluate device functionality. Capacitive coupling of the suspended mass/inertia is inherently superimposed into the system dynamic. With careful acquisition of the electrically coupled portion, extracting the desired mechanical transfer function is both possible and direct.
Từ khóa
#Micromechanical devices #Micromotors #Testing #Frequency #Stators #Couplings #Fingers #Silicon #Optical filters #Optical modulationTài liệu tham khảo
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