Micromolding fabrication of microresistors with a composite of carbon nanotubes and SU-8 polymer and the application in Wilkinson power divider

Anna M, Kristoffer A, Niklas R (2012) Combined TiN- and TaN temperature compensated thin film resistors. Thin Solid Films 520:2162–2165

Bychanok DS, Kanygin MA, Okotrub AV, Shuba MV, Paddubskaya AG, Pliushch AO, Kuzhir PP, Maksimenko SA (2011) Anisotropy of the electromagnetic properties of polymer composites based on multiwall carbon nanotubes in the gigahertz frequency range. JETP Lett 93:607–611

Claudio G, Marijana M, Richard G, László F, Arnaud M (2013) Electrical conductivity of multi-walled carbon nanotubes-SU8 epoxy composites. Appl Phys Lett 102:1–4

Gorala M, Swadzbaa L, Moskala G, Hetmanczyka M, Tetsuib T (2009) Si-modified aluminide coatings deposited on Ti46Al7Nb alloy by slurry method. Intermetallics 17:965–967

Kang SM, Yoon SG, Suh SJ, Yoon DH (2006) Control of electrical resistivity of TaN thin films by reactive sputtering for embedded passive resistors. Thin Solid Films 516:3568–3571

Kim P, Shi L, Majumdar A, McEuen PL (2001) Thermal transport measurements of individual multiwalled nanotubes. Phys Rev Lett 87:215502

Lai L, Zeng W, Fu X, Sun R, Du R (2012) Annealing effect on the electrical properties and microstructure of embedded Ni–Cr thin film resistor. J Alloy Compd 538:125–130

Lee JU, Yoon D, Cheong H (2012) Estimation of Young’s modulus of graphene by Raman spectroscopy. J Nano Lett 9:4444–4448

Li YF, Kaneko T, Ogawa T, Takahashi M, Hatakeyama R (2008) Novel properties of single-walled carbon nanotubes with encapsulated magnetic atoms. Jpn J Appl Phys 47:2048–2055

Maher F, El K, Veronica S, Sergey D, Richard Kane B (2012) Laser scribing of high-performance and flexible graphene-based electrochemical capacitors. Science 335:1326–1330

Marta Klanjšek G, Nina H, Marijan M, Matjaž K (2009) The influence of hard-baking temperature applied for SU8 sensor layer on the sensitivity of capacitive chemical sensor. Appl Phys A 95:673–680

Mei-Ying Y, Gun F, Xue-Feng Y, Zhao-Lun F (2002) Studies on bonding techniques for poly (dimethylsiloxane) microfluidic chips. Chem J Chin Univ 23:2243–2246

Mironov VS, Kim JK, Park M, Lim S, Cho WK (2007) Comparison of electrical conductivity data obtained by four-electrode and four-point probe methods for graphite-based polymer composites. Polym Test 26:547–555

Park KY, Lee SE, Kim CG, Han JH (2005) Fabrication and electromagnetic characteristics of electromagnetic wave absorbing sandwich structures. Compos Sci Technol 66:576–584

Qian D, Wagner Gregory J, Liu Wing K (2002) Mechanics of carbon nanotubes. Appl Mech Rev 55:495–532

Qin F, Brosseau C (2012) A review and analysis of microwave absorption in polymer composites filled with carbonaceous particles. Appl Phys 111:061301

Ren L, Pint CL, Booshenri LG, Rice WD, Wang XF, Hilton DJ, Takeya K, Kawayama I, Tonouchi M, Hauge RH, Kono J (2009) Carbon nanotube terahertz polarizer. Nano Lett 9:2610–2613

Rodney Ruoff S, Donald Lorents C (1995) Mechanical and thermal properties of carbon nanotubes. Carbon 33:925–930

Shao G, Wu J, Cai Z, Wang W (2012) Fabrication of elastomeric highaspect-ratio microstructures using polydimethylsiloxane (PDMS) double casting technique. Sens Actuators A 178:230–236

Xiao XD, Dong GP, Shao JD, He HB, Fan ZX (2010) Optical and electrical properties of SnO2: Sb thin films deposited by oblique angle deposition. Appl Surf Sci 256:1636–1640

Microchem Manual. Product manual. MicroChem Corp., 200 Flanders Road, Westborough, MA 01581 USA

Yang R, Wang W (2005) A numerical and experimental study on gap compensation and wavelength selection in UV-lithography of ultra-high aspect ratio SU-8 microstructures. Sens Actuators B Chem 110:279–288

Zhang M, Atkinson Ken R, Baughman Ray H (2004) Multifunctional carbon nanotube yarns by downsizing an ancient technology. Science 206:1358–1361

Zhang L, Zhu H, Song Y, Zhang YM, Huang Y (2008) The electromagnetic characteristics and absorbing properties of multi-walled carbon nanotubes filled with Er2O3 nanoparticles as microwave absorbers. Mater Sci Eng 153:78–82

Zhu XD, Li SL, Ao Q, Yang XJ (2011) Deterioration and film forming abilities of the slurries used for preparing La08Sr02MnO3 films through composite sol–gel method. J Alloy Compd 509:7093–7099

Zhuangjun F, Guohua L, Zengfu Z, Li Z, Fei W (2006) Electromagnetic and microwave absorbing properties of multi-walled carbon nanotubes/polymer composites. Mater Sci Eng 132:85–89