Micromechanical thermal converter of power alternating current
Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials - Tập 1 - Trang 3 pp. - 2002
Tóm tắt
The microconverter construction and its fabrication process route designed. The approaching technological materials are selected. The heat fluxes and electrical performances simulations of the device are worked out. All fabrication operations, according to a process route are developed. Experimental samples are explored and results compared with a performance of secondary etalon. On the basis of obtained data the indispensable changes are introduced in to the microconverter construction. The upgraded thermoelectric converter at present of time is made according to an improved process route.
Từ khóa
#Micromechanical devices #Thermoelectricity #Resistance heating #Voltage #Thermal resistance #Thermal conductivity #Electric variables measurement #Wire #Manufacturing processes #Mechanical sensorsTài liệu tham khảo
odintsov, 2001, The thermoelectric microconverter of a voltage of an alternating current, The third All-Russia youth conference on physics of semiconductors and semiconductor opto - and nanoelectronics (theses of reports)
odintsov, 2000, The thermal converter of an alternating current made by methods of microtechnologies, The fifth St -Petersburg assembly of young scientists and experts (theses of reports)
kazakin, 2000, The current development of laboratory MT and MEMS, The second All-Russia youth conference on physics of semiconductors and semiconductor opto - and nanoelcctronics (theses of reports)