Microlenses array fabrication by hot embossing process
IEEE/LEOS International Conference on Optical MEMs - Trang 73-74
Tóm tắt
For the mass production of microlenses array, the hot embossing process has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of microlenses array that is fabricated by the modified LIGA process.
Từ khóa
#Lenses #Microoptics #Embossing #Rough surfaces #Surface roughness #Optical arrays #Optical devices #Temperature #Optical device fabrication #Atomic measurementsTài liệu tham khảo
lee, 2002, J Micromech Microeng, 12, 1, 10.1088/0960-1317/12/1/301
10.1016/S0167-9317(01)00695-5
10.1016/S0167-9317(00)00416-0
shen, 2002, Sensors and Actuators A, 3323, 1