Microelectromechanical System for Controlling Flow Past an Airfoil: Pressure Transducers
Tóm tắt
A technology is developed for making single-chip diaphragm pressure sensors with polycrystalline-silicon piezoresistive elements on a monocrystalline-silicon substrate. It allows one to produce piezoresistive elements with a conductivity–temperature characteristic that neutralizes the temperature dependence of piezoresistive sensitivity. Sensors with a 1.8 × 1.8-mm2 diaphragm are designed and fabricated by the above technology for pressures ranging from 1 to 105 Pa, showing a maximum sensitivity of 10–6 Pa–1. The sensors are tested in aerodynamic experiments on monitoring the flow past a model wing of finite span at angles of attack close to the stall angle.
Tài liệu tham khảo
Boiko, A.V., Grek, G.R., Dovgal', A.V., and Kozlov, V. V., Vozniknovenie turbulentnosti v pristennykh techeniyakh (Transition to Turbulent Flow in Wall Layers), Novosibirsk: Nauka, 1999.
Gridchin, V.A., Fizicheskie osnovy sensornoi elektroniki. Uchebnoe posobie (Physical Basis of Sensing Electronics: A Textbook), part 1: Sensory mekhanicheskikh velichin (Mechanical-Input Sensors), Novosibirsk: NGTU, 1995.
Gerlach, G. und Dotzel, W., Grundlagen der Mikrosystem-Technik, Hanser Lehrbuch, 1997.
Gridchin, V.A. and Gridchin, A.V., The Four-Terminal Piezotransducer: Theory and Comparison with Piezoresistive Bridge, Sens. Actuators, A, 1997, vol. 58, pp. 219-223.
Gridchin, V.A., Lubimsky, V.M., and Sarina, M.P., Piezoresistive Properties of Polysilicon Films, Sens. Actuators, A, 1995, vol. 49, pp. 67-72.