Micro-grooving on quartz crystals by an abrasive air jet

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science - Tập 225 Số 9 - Trang 2161-2173 - 2011
Jun Wang1, Alireza Moridi1, P. Mathew1
1School of Mechanical and Manufacturing, Engineering, The University of New South Wales, Sydney, Australia#TAB#

Tóm tắt

An investigation of the micro-grooving performance of abrasive air jet (AAJ) on quartz crystals is presented and discussed. An experimental study was carried out first to understand the effect of process parameters on the major grooving performance measures such as groove depth, groove width, kerf taper, and surface roughness. Plausible trends for these grooving performance measures with respect to the various process variables, such as air pressure, nozzle traverse speed, jet impact angle, and abrasive mass flowrate, are discussed. It is found that AAJ is an effective technology for micromachining of quartz crystals and the grooving performance can be improved or optimized by selecting the process parameters properly. Predictive models are then developed for quantitatively estimating the micro-grooving performance. The models are finally verified by an experiment. It shows that the model predictions are in good agreement with the experimental results under the corresponding conditions.

Từ khóa


Tài liệu tham khảo

10.1016/0378-3804(83)90042-6

10.1016/0020-7357(84)90043-X

10.4028/www.scientific.net/KEM.359-360.404

10.1016/j.wear.2008.12.019

10.4028/www.scientific.net/KEM.443.645

10.1115/1.3225682

10.1115/1.3226448

10.1115/1.2901639

10.1007/BF01305869

10.1016/S0924-0136(97)00229-X

10.1016/0890-6955(95)00108-5

10.1007/s001700050129

10.1016/S0924-0136(01)01246-8

10.1016/j.ijmecsci.2006.09.005

10.1504/IJAT.2007.015385

10.1016/S0043-1648(99)00180-5

ten Thije Boonkkamp J. H. M., 2002, Surv. Math. Ind, 10, 89

10.1023/A:1020359220269

10.1016/j.wear.2007.02.020

10.1088/0960-1317/11/4/318

10.1109/84.982867

Belloy E., Pawlowski A. G., Sayah A., Gijs M. A. M. Microfabrication of high-aspect ratio and complex monolithic structures in glass. J. Microelectromech. Syst.. 2002, 11, 521–527.

Liu, H. A study of the cutting performance in abrasivewaterjet contouring of alumina ceramics and associated jet dynamic characteristics. PhD Thesis, Queensland University of Technology, 2004.

10.1016/j.jmatprotec.2008.05.021

10.1016/j.jmatprotec.2008.10.021

10.1016/j.jmatprotec.2007.03.111

10.1016/0043-1648(60)90055-7

10.1098/rspa.1978.0106

10.1111/j.1151-2916.1980.tb10768.x

Wang J., 2003, Abrasive waterjet machining of engineering materials, 19

Moridi, A. Abrasive jet micromachining of quartz crystals, Master of Engineering (Research) Thesis, The University of New South Wales, 2010.

10.1520/STP35797S

10.1111/j.1151-2916.1981.tb10264.x

10.1016/0043-1648(88)90180-9

10.1016/0043-1648(95)06694-2

Anderson J. D. Fundamentals of aerodynamics, edition 3, 2001, (McGraw Hill, New York).

10.1016/0043-1648(95)06641-1

10.1115/1.3443425

10.1016/j.ijmachtools.2009.05.012

Thông tin
Thông tin xuất bản

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Tập 225 Số 9

2161-2173

Thông tin tác giả