Micro-fabricated system for wavelengths monitoring
IEEE/LEOS International Conference on Optical MEMs - Trang 23-24
Tóm tắt
Presents a new design of a time-scanning Michelson interferometer realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology. The new design allows auto-calibration of the motion of the scanning mirror. The device is suitable for monitoring about 50 channels at the telecom wavelength (/spl lambda/=1.5/spl mu/m).
Từ khóa
#Monitoring #Optical interferometry #Mirrors #Lenses #Optical devices #Silicon #Resists #Biomedical optical imaging #Optical sensors #SpectroscopyTài liệu tham khảo
10.1364/OL.24.001705