Micro-electro-mechanical digital-to-analog converter based on a novel bimorph thermal actuator
SENSORS, 2002 IEEE - Tập 2 - Trang 1036-1041 vol.2
Tóm tắt
A novel micro-electro-mechanical digital-to-analog converter based on a bimorph thermal actuator (bimorph MEMDAC) is proposed in the paper. Driven by four-bit digital voltage of 5 V, it can produce out-of-plane deflection. Compared to the conventional bimorph thermal actuators driven by analog voltages, it could be controlled precisely by digital voltages. Finite element analysis, in which a three-layer model is used to improve the accuracy, shows that the maximum out-of-plane displacement and deflection angle is 22.1/spl mu/m and 0.228rad, respectively. The nonlinear error of the preliminary design is 0.5/spl mu/m. The error could be reduced to below 0.1/spl mu/m by design modifications.
Từ khóa
#Digital-analog conversion #Actuators #Voltage #Resistors #Finite element methods #Silicon #Heating #Micromechanical devices #Electronic circuits #Thermal resistanceTài liệu tham khảo
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