Methods for improving surface flatness in thick Cu film electrodeposition
Tóm tắt
Từ khóa
Tài liệu tham khảo
Tavkhelidze, A., Skhiladze, G., Bibilashvili, A., Tsakadze, L., Jangidze, L., Taliashvili, Z., Cox, I., and Berishvili, Z., Electron Tunneling through Large Area Vacuum Gap—Preliminary Results, in Proc. Thermoelectrics 2002 Int. Conf., 2002, pp. 435–438.
Frish, S.E., Opticheskie metody izmereniya (Optical Measurement Techniques), part 2: Luchevaya optika i granitsy ee primeneniya (Ray Optics and Its Limits), Leningrad: Leningr. Gos. Univ., 1980.
Lainer, V.I., Zashchitnye pokrytiya metallov (Protective Coatings on Metals), Moscow: Metallurgiya, 1974.
Dasoyan, M.A., Pal’mskaya, I.Ya., and Sakharova, E.V., Tekhnologiya elektrokhimicheskikh pokrytii (Electrochemical Coating Processes), Leningrad: Mashinostroenie, 1989.
Taliashvili, Z.I., Vardosanidze, L.R., Jangidze, L.B., and Tavkhelidze, A.N., Jr., Adjusting the Adhesion Strength of Metal Thin Films in Multilayers, Mikroelektronika [Russ. Microelectron. (Engl. Transl.)] (in press).
Kadaner, L.I., Gal’vanostegiya (Electroplating), Kiev: Tekhnika, 1964.
Vainer, Ya.V. and Dosoyan, M.A., Tekhnologiya elektrokhimicheskikh pokrytii (Electrochemical Coating Processes), Mashinostroenie, 1972.
Popereka, M.Ya., Vnutrennie napryazheniya elektroliticheski osazhdennykh metallov (Internal Stress of Electrodeposited Metals), Novosibirsk: Zapadnosibirskoe Knizhnoe Izdatel’stvo, 1966.
Vagranyan, A.T., Fiziko-mekhanicheskie svoistva elektroliticheskikh osadkov (Physical and Mechanical Properties of Electrodeposits), Moscow: Izdatel’stvo AN SSSR, 1960.
Yampol’skii, A.M. and Il’in, V.A., Kratkii spravochnik gal’vanotekhnika (Electrodepositor’s Short Guide), Moscow: Mashinostroenie, 1981.
Spravochnik po gal’vanotekhnike (Handbook of Electrodeposition), Lainer, V.I., Ed., Moscow: Metallurgiya, 1967.
Vyacheslavov, P.M. et al., Kontrol’elektrolitov i pokrytii (Testing Electrolytes and Coatings), Leningrad: Mashinostroenie, 1985.
Sadakov, A. Gal’vanoplastika (Electroforming), Moscow: Mashinostroenie, 1987.