Magnetron plasma-enhanced chemical vapor deposition of diamond-like carbon thin films
Tài liệu tham khảo
Grill, 1999, Diamond Relat. Mater., 8, 428, 10.1016/S0925-9635(98)00262-3
Tsai, 1987, J. Vac. Sci. Technol., A, 5, 3287, 10.1116/1.574188
Andular, 2003, Diamond Relat. Mater., 12, 98, 10.1016/S0925-9635(03)00009-8
Ianno, 1995, Thin Solid Films, 275, 10.1016/0040-6090(95)06710-8
Yamada, 1995, Thin Solid Films, 220, 10.1016/0040-6090(95)06892-9
Patil, 2000, Pramana—J. Phys., 55, 935, 10.1007/s12043-000-0062-9
Takikawa, 2003, Surf. Coat. Technol., 163–164, 368, 10.1016/S0257-8972(02)00629-1
Wang, 1997, Thin Solid Films, 293, 87, 10.1016/S0040-6090(96)09040-2
Li, 1999, Appl. Surf. Sci., 137, 30, 10.1016/S0169-4332(98)00485-1
Shin, 2000, J. Vac. Sci. Technol., B, 18, 1027, 10.1116/1.591320
Wu, 2002, Thin Solid Films, 420–421, 166, 10.1016/S0040-6090(02)00804-0
Robertson, 2002, Mater. Sci. Eng., R, 37, 129, 10.1016/S0927-796X(02)00005-0
Anita, 2004, 13 (11–12), 1993
Chapmann, 1980
www.jyhoriba.com, A.N.07 (2000), Derivation of Physical Parameters from Raman Spectroscopy of Hard Carbon Films.