Low drift air-gap CMOS-FET gas sensor
SENSORS, 2002 IEEE - Tập 1 - Trang 421-425 vol.1
Tóm tắt
We developed a low drift CMOS GasFET for a wide variety of gases like H/sub 2/, NH/sub 3/ or NO/sub 2/ combining the advantages of previous CCFET and SGFET concepts. The design comprises an insulated floating electrode structure for hybrid-mounted sensitive gates. The transducer has a low long term drift and temperature coefficient, comparable to a MOSFET, as measurements under real conditions prove.
Từ khóa
#Air gaps #Gas detectors #Electrodes #FETs #Temperature sensors #Capacitors #Insulation #Transducers #MOSFET circuits #StabilityTài liệu tham khảo
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