Laser wavelength dependent properties of YBa2Cu3O7−δ thin films deposited by laser ablation

Applied Physics Letters - Tập 55 Số 23 - Trang 2450-2452 - 1989
G. Koren1, Arunava Gupta1, Robert J. Baseman1, K. Nakajima1, R. B. Laibowitz1
1IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598

Tóm tắt

YBa2Cu3O7−δ thin films were deposited onto (100) SrTiO3 substrates using 1064, 532, 355, 248, and 193 nm laser ablation. Transport measurements show lower normal-state resistivities and higher critical currents in films deposited by the shorter wavelength lasers. The surface morphology of the films was rough with large particulates when the 1064 nm laser was used whereas much smoother surfaces with fewer and smaller particulates were obtained with the UV lasers. It is suggested that the better film quality obtained when the UV lasers are used is due to a small absorption depth of the UV photons in the ceramic target and to higher absorption by the ablated fragments. This leads to smaller ablated species and further fragmentation in the hotter plume and, therefore, to smoother and denser films.

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Tài liệu tham khảo

1988, Appl. Phys. Lett., 52, 754, 10.1063/1.99337

1988, Appl. Phys. Lett., 53, 243, 10.1063/1.100588

1988, Solid State Commun., 67, 965, 10.1016/0038-1098(88)90466-8

1988, Appl. Phys. Lett., 53, 1557, 10.1063/1.100437

1988, Appl. Phys. Lett., 53, 2330, 10.1063/1.100515

1989, Appl. Phys. Lett., 54, 1054, 10.1063/1.101559

1989, Appl. Phys. Lett., 54, 1920, 10.1063/1.101496

1988, CRC Crit. Rev. Solid State Mater. Sci., 15, 63, 10.1080/10408438808244625

1988, Physica C, 153-155, 661, 10.1016/S0921-4534(88)80025-X

1987, Appl. Phys. Lett., 50, 1030, 10.1063/1.97960

1988, Appl. Phys. Lett., 53, 534, 10.1063/1.100628

1988, Appl. Phys. Lett., 53, 1762, 10.1063/1.100477

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Thông tin xuất bản

Applied Physics Letters

Tập 55 Số 23

2450-2452

Thông tin tác giả