Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics

V. Egorov1, E. Egorov2,1,3
1Institute of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka, Russia
2Financial University under the Government of the Russian Federation, Moscow, Russia
3Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Fryazino, Russia

Tóm tắt

The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for these method applications. Experimental results, which confirm the high efficiency of real objects investigation by these methods are discussed. Possible directions of ion beam analysis and X-ray methodical background on base of the planar X-ray waveguide-resonators application are pointed. The profit from its devises use is re-ndered.

Từ khóa


Tài liệu tham khảo

Alford, T., Feldman, L.C., and Mayer, J.W., Fundamentals of Nanoscale Film Analysis, New York: Springer, 2007. https://doi.org/10.1007/978-0-387-29261-8 Johanson, S.A.E., Campbell, J.L., and Malquist, K.G., Particle Induced X-ray Emission Spectrometry (PIXE), New York: Wiley, 1995. Klockenkamper, R. and von Bohlen, A., Total-Reflection X-ray Fluorescence Analysis and Related Methods, New York: Wiley, 1995. https://doi.org/10.1002/9781118985953 Van Grieken, R. and Markowicz, A., Handbook of X‑Ray Spectrometry, New York: CRC Press, 2001, 2nd ed. https://doi.org/10.1201/9780203908709 Egorov, V.K. and Egorov, E.V., TXRF spectrometry in conditions of planar x-ray waveguide-resonator applic-ation, 21st Century Nanoscience–A Handbook, Sattl-er, K.D., Ed., Boca Raton, Fla.: CRC Press, 2020, vol. 16, pp. 16.1–16.32. https://doi.org/10.1201/9780429340420-16 Bertin, E.P., Principle and Practice of X-Ray Spectrometric Analysis, New York: Plenum Press, 1975. Egorov, V.K. and Egorov, E.V., Planar waveguide-resonator: A new device for X-ray optics, X-Ray Spectrom., 2004, vol. 33, no. 5, pp. 360–371. https://doi.org/10.1002/xrs.735 Egorov, V.K. and Egorov, E.V., The compact TXRF cell on base of the planar X-ray waveguide-resonator, Adv. X‑ray Chem. Anal. (Jpn.), 2012, vol. 43, pp. 139–146. https://doi.org/10.57415/xshinpo.43.0_139 Hofsäss, H., Forward Recoil Spectrometry, New York: Springer, 1996. https://doi.org/10.1007/978-1-4613-0353-4 Martin, P.M., Handbook of Deposition Technology for Films and Coatings, Boston: William Andrew Publ., 2010. Doulittle, L.R., Algorithms for the rapid simulation of Rutherford backscattering spectra, Nucl. Instrum. Methods Phys. Res., Sect. B: Beam Interact. Mater. Atoms, 1985, vol. 9, no. 3, pp. 344–351. https://doi.org/10.1016/0168-583x(85)90762-1 Cahill, T.A., Proton microprobes and particle-induced X-ray analytical systems, Annu. Rev. Nucl. Part. Sci., 1980, vol. 30, no. 1, pp. 211–252. https://doi.org/10.1146/annurev.ns.30.120180.001235 Van Kan, J.A. and Vis, R.D., Glancing incident MeV ion beams for total reflection PIXE (TPIXE) and RBS surface analysis, Nucl. Instrum. Methods Phys. Res., Sect. B: Beam Interact. Mater. Atoms, 1996, vol. 113, nos. 1–4, pp. 373–377. https://doi.org/10.1016/0168-583x(95)01355-5 Afanasiev, M.S., Egorov, V.K., Egorov, E.V., Kuharskaya, N.F., Nabiev, A.E., and Naryshkina, V.G., The total-reflection X-Ray fluorescence yield formed by a waveguide resonator under conditions of ion beam excitation, Instrum. Exp. Tech., 2019, vol. 62, no. 5, pp. 659–663. https://doi.org/10.1134/s0020441219050014