InSb, GaSb, and GaInSb grown using trisdimethylaminoantimony
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G.B. Stringfellow,Organometallic Vapor Phase Epitaxy: Theory and Practice (Boston: Academic Press, 1989).
C.H. Chen, K.T. Huang, D.L. Drobeck and G.B. Stringfellow,J. Cryst. Growth 124 (1992)142; R.M. Biefeld and R.W. Gedridge, Jr.,J. Cryst. Growth 124 150 (1992).
G.T. Stauf, D.K. Gaskill, N. Bottka and R.W. Gedridge, Jr.,Appl. Phys. Lett. 58,1311 (1991); C.H. Chen, Z.M. Fang, G.B. Stringfellow and R.W. Gedridge, Jr.,J. Appl. Phys. 69, 7605 (1991).
C.P. Kuo, R.M. Cohen and G.B. Stringfellow,Appl. Phys. Lett. 64, 61 (1983).
S.K. Haywood, A.B. Henriques, N.J. Mason, R.J. Nicholas and P.J. Walker,Semicond. Sci. Technol. 3, 315 (1988); and F. Pascal, F. Delannoy, J. Bougnot, L. Gouskov, G. Bougnot, P. Grosse and J. Kaoukab,J. Electron. Mater. 19, 187 (1990).
W. Jakowetz, W. Ruhle, K. Breuninger and M. Pilkuhn.Phys. Stat. Solidi A 12,169 (1972); M. Ichimura, K. Higuchi, Y. Hattori and T. Wada,J. Appl. Phys. 68, 6153 (1990).
G. Bougnot, A.F. Foucaran,M. Marjan, D. Etiene, J. Bougnot, F.M.H. Dellannoy and F.M. Roumanille,J. Cryst. Growth 77, 400 (1986).
X. F. Liu, H. Asahi, K. Inoue, D. Marx, K. Asami, K. Miki and S. Gonda,Appl. Phys. Lett. 65, 1027 (1994).
G. Bougnot, F. Dellannoy, F. Pascal, P. Grosse, A. Giani, J. Kaoukab, J. Bougnot, R. Fourcade, P.J. Walker, N.J. Mason and B. Lambert,J. Cryst. Growth 107, 502 (1991).
C.H. Chen, C.T. Chiu, L.C. Su, K.T. Huang, J. Shin and G.B. Stringfellow,J. Electron. Mater. 69, 7605 (1991).