InGaN-Based Multi-Quantum-Well-Structure Laser Diodes

Japanese Journal of Applied Physics - Tập 35 Số 1B - Trang L74 - 1996
Shuji Nakamura1, Masayuki Senoh1, Shin‐ichi Nagahama1, Naruhito Iwasa1, Takehiro Yamada1, Toshio Matsushita1, Hiroyuki Kiyoku1, Yasunobu Sugimoto1
1Department of Research and Development, Nichia Chemical Industries, Ltd.,

Tóm tắt

InGaN multi-quantum-well (MQW) structure laser diodes (LDs) fabricated from III-V nitride materials were grown by metalorganic chemical vapor deposition on sapphire substrates. The mirror facet for a laser cavity was formed by etching of III-V nitride films without cleaving. As an active layer, the InGaN MQW structure was used. The InGaN MQW LDs produced 215 mW at a forward current of 2.3 A, with a sharp peak of light output at 417 nm that had a full width at half-maximum of 1.6 nm under the pulsed current injection at room temperature. The laser threshold current density was 4 kA/cm2. The emission wavelength is the shortest one ever generated by a semiconductor laser diode.

Từ khóa


Tài liệu tham khảo

10, 1237

1994, J. Appl. Phys., 76, 1363, 10.1063/1.358463

1989, Jpn. J. Appl. Phys., 28, L2112, 10.1143/JJAP.28.L2112

1992, Jpn. J. Appl. Phys., 31, L1457, 10.1143/JJAP.31.L1457

1993, Appl. Phys. Lett., 63, 2455, 10.1063/1.110473

1992, Jpn. J. Appl. Phys., 31, 1258, 10.1143/JJAP.31.1258

1993, Appl. Phys. Lett., 63, 990, 10.1063/1.109816

1993, J. Appl. Phys., 74, 3911, 10.1063/1.354486

1995, Jpn. J. Appl. Phys. Lett., 34, L797, 10.1143/JJAP.34.L797

1995, Jpn. J. Appl. Phys. Lett., 34, L1332, 10.1143/JJAP.34.L1332

1971, Appl. Phys. Lett., 19, 5, 10.1063/1.1653730

1994, Appl. Phys. Lett., 65, 520, 10.1063/1.112284

1994, Appl. Phys. Lett., 64, 1377, 10.1063/1.111942

1995, Appl. Phys. Lett., 67, 533, 10.1063/1.115179

1991, Appl. Phys. Lett., 59, 1272, 10.1063/1.105472

1994, Jpn. J. Appl. Phys., 33, 938, 10.1143/JJAP.33.938

1991, Jpn. J. Appl. Phys., 30, 1620, 10.1143/JJAP.30.1620