Impact of floating gate dry etching on erase characteristics in NOR flash memory
Tóm tắt
We report the effects of plasma process-induced damage during floating gate (FG) dry-etching process on the erase characteristics of NOR flash cells. As compared to flash cells processed in a stable plasma condition, it is found that flash cells processed in the nonoptimized ambient show significantly degraded erase characteristics under a negative gate Fowler-Nordheim (FN) bias, exhibiting a fast-erasing bit in the distribution of erased bits. However, little differences are found in their tunneling characteristics under a positive gate biasing. The gate bias polarity dependence of FN tunneling indicates that positive charges are created near the poly-Si/SiO/sub 2/ interface during the FG dry-etching, prior to the backend processes such as metal- or via-etch.
Từ khóa
#Nonvolatile memory #Dry etching #Flash memory #Plasma applications #Plasma properties #Tunneling #Gases #Degradation #Plasma stability #Threshold voltageTài liệu tham khảo
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