Impact of electron heat conductivity on electron energy flux

K. Matsuzawa1
1Advanced LSI Technology Laboratory, Toshiba Corporation, Yokohama, Japan

Tóm tắt

Equations in the hydrodynamic model were evaluated by direct calculation of the drift, diffusion, and scattering terms obtained by separating the motion of particles in Monte Carlo simulations. It was confirmed that the conservation equations for momentum and energy were constructed adequately. However, it was found that an artificial operation was necessary for describing the energy flux equation. Namely, the parameter of the Wiedemann-Franz law for heat conductivity could be chosen so that the underestimations of the drift and diffusion terms in the energy flux equation cancelled each other. It is shown that this parameter influences the electron temperature in a 50 nm gate nMOSFET.

Từ khóa

#Electrons #Conductivity #Particle scattering #Hydrodynamics #Scattering parameters #Boltzmann equation #Steady-state #Temperature distribution #Large scale integration #Laboratories

Tài liệu tham khảo

10.1103/PhysRevLett.77.1115 10.1109/43.293947 bordelon, 1990, IEDM Tech Dig, 353 10.1109/43.536710 10.1109/16.259623 10.1109/16.182528 pierantoni, 1994, IEICE Trans Electron, e77 c, 139 10.1109/T-ED.1970.16921