High-rate synthesis of Si nanowires using modulated induction thermal plasmas

Applied Physics Express - Tập 10 Số 9 - Trang 096201 - 2017
Yosuke Ishisaka1, Naoto Kodama1, Kentaro Kita1, Yasunori Tanaka1,2, Yoshihiko Uesugi1,2, Tatsuo Ishijima2, Shiori Sueyasu3, Shu Watanabe3, Keitaro Nakamura3
1Faculty of Electrical Engineering and Computer Science, Kanazawa University, Kanazawa 920-1192, Japan
2Research Center for Sustainable Energy and Technology, Kanazawa University, Kanazawa 920-1192, Japan
3Research Center for Production and Technology, Nisshin Seifun Group Inc., Fujimino, Saitama 356-8511, Japan

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Applied Physics Express

Tập 10 Số 9

096201

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