High Q multilayer spiral inductor on silicon chip for 5/spl sim/6 GHz
Tóm tắt
High Q-values of spiral inductors at frequency around 5/spl sim/6 GHz have been achieved with a multilayer spiral (MLS) structure on a high loss silicon substrate. Compared to a one-layer spiral (OLS) inductor, the Q-value of a 4-nH inductor has been improved by about 80% at 5.65 GHz. The impact of the structure on Q-value and resonant frequency has been analyzed, which shows that an optimal height for the via of MLS inductors should be considered when inductors are designed. The fabrication process is compatible with Cu/SiO/sub 2/ interconnect technology.
Từ khóa
#Nonhomogeneous media #Spirals #Inductors #Silicon #CMOS technology #Multilevel systems #Integrated circuit interconnections #Frequency #Copper #Wireless LANTài liệu tham khảo
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