Frequency selective sensor arrays for vibration measurement
SENSORS, 2002 IEEE - Tập 1 - Trang 675-679 vol.1
Tóm tắt
Describes a new microsystem for vibration measurement based on frequency selective sensor arrays with electrically tunable band selectivity for the frequency range from 1 to 10 kHz. The band selectivity is achieved by electrostatic forces.
Từ khóa
#Sensor arrays #Vibration measurement #Resonance #Electrostatics #Resonant frequency #Tuning #Sensor phenomena and characterization #Tensile stress #Frequency measurement #Chemical technologyTài liệu tham khảo
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