Formation of Periodic Microbump Arrays by Metal-Assisted Photodissolution of InP

Japanese Journal of Applied Physics - Tập 49 Số 4R - Trang 046505 - 2010
Hidetaka Asoh1, Takayuki Yokoyama1, Sachiko Ono1
1Department of Applied Chemistry, Faculty of Engineering, Kogakuin University, 2665-1 Nakano, Hachioji, Tokyo 192-0015, Japan

Tóm tắt

The metal-assisted chemical etching of an InP substrate combined with UV irradiation was investigated. Microbump arrays with ordered intervals were fabricated by the site-selective photodissolution of an InP substrate using patterned noble-metal films as catalysts. The etching rate of the InP substrate using noble-metal catalysts was drastically accelerated by UV irradiation. The etching speed of the present “metal-assisted photodissolution” increased in the order of Au < Pd < Pt, corresponding to the order of the magnitude of the work function of each metal used in this study.

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Tài liệu tham khảo

1990, J. Electrochem. Soc., 137, 653, 10.1149/1.2086525

2001, Appl. Phys. Lett., 79, 1727, 10.1063/1.1401792

2003, J. Appl. Phys., 94, 7598, 10.1063/1.1628836

2004, Adv. Mater., 16, 2166, 10.1002/adma.200400436

2005, Electrochem. Solid-State Lett., 8, C30, 10.1149/1.1847683

2008, Electrochem. Solid-State Lett., 11, H111, 10.1149/1.2844216

2000, Appl. Phys. Lett., 77, 2572, 10.1063/1.1319191

2004, J. Appl. Phys., 96, 6888, 10.1063/1.1806992

2005, Adv. Mater., 17, 1045, 10.1002/adma.200401681

2005, Electrochem. Solid-State Lett., 8, C193, 10.1149/1.2109347

2006, Electrochem. Commun., 8, 1817, 10.1016/j.elecom.2006.08.021

2007, Electrochem. Commun., 9, 535, 10.1016/j.elecom.2006.10.041

2007, ECS Trans., 6, N

2008, Appl. Phys. Express, 1, 067003, 10.1143/APEX.1.067003

2009, Electrochim. Acta, 54, 5142, 10.1016/j.electacta.2009.01.050

Phys. Status Solidi A, 10.1002/pssa.200925595

2004, Electrochim. Acta, 49, 3129, 10.1016/j.electacta.2004.02.027

1977, J. Appl. Phys., 48, 4729, 10.1063/1.323539

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Thông tin xuất bản

Japanese Journal of Applied Physics

Tập 49 Số 4R

046505

Thông tin tác giả