Factors influencing open circuit decomposition behavior of sulfur-containing additive component used in Cu plating for advanced interconnect metallization

Microelectronics Journal - Tập 32 - Trang 973-977 - 2001
L.T Koh1, G.Z You1, S.Y Lim2, C.Y Li1, P.D Foo1
1Department of Deep Submicron Integrated Circuit Technology, Institute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685
2Department of Electrical and Electronic Engineering, National University of Singapore, Singapore

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