Enhancement of rutile phase formation in TiO2 films deposited on stainless steel substrates with a vacuum arc

Thin Solid Films - Tập 638 - Trang 269-276 - 2017
L.M. Franco Arias1, A. Kleiman1, D. Vega2,3, M. Fazio1, E. Halac2,3, A. Márquez1
1Instituto de Física del Plasma, CONICET, Departamento de Física, Facultad de Ciencias Exactas y Naturales, Universidad de Buenos Aires, Cdad. Universitaria Pab. 1, 1428, Buenos Aires, Argentina
2Departamento Física de la Materia Condensada, Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz, 1499 San Martín, Buenos Aires, Argentina
3Escuela de Ciencia y Tecnología, Universidad Nacional de San Martín, Provincia de Buenos Aires, Argentina

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