Electrostatic Imprint Process for Glass

Applied Physics Express - Tập 1 - Trang 024003
Hideki Takagi1, Shinichi Miyazawa1, Masaharu Takahashi1, Ryutaro Maeda1
1Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan

Tóm tắt

Từ khóa


Tài liệu tham khảo

Hirai, 2003, Microelectron. Eng., 67--68, 237, 10.1016/S0167-9317(03)00077-7

Saotome, 2003, J. Mater. Process. Technol., 140, 379, 10.1016/S0924-0136(03)00828-8

Takahashi, 2005, Jpn. J. Appl. Phys., 44, 5600, 10.1143/JJAP.44.5600

Youn, 2006, J. Micromech. Microeng., 16, 2576, 10.1088/0960-1317/16/12/009

Takahashi, 2007, Microsyst. Technol., 13, 379, 10.1007/s00542-006-0186-z

Sutton, 1964, J. Am. Ceram. Soc., 47, 188, 10.1111/j.1151-2916.1964.tb14390.x

Sutton, 1964, J. Am. Ceram. Soc., 47, 219, 10.1111/j.1151-2916.1964.tb14400.x

Wallis, 1969, J. Appl. Phys., 40, 3946, 10.1063/1.1657121

Wallis, 1970, J. Am. Ceram. Soc., 53, 563, 10.1111/j.1151-2916.1970.tb15967.x

Esashi, 1990, Sens. Actuators A, 23, 931, 10.1016/0924-4247(90)87062-N

Anthony, 1983, J. Appl. Phys., 54, 2419, 10.1063/1.332357

Plaza, 1997, Sens. Actuators A, 60, 176, 10.1016/S0924-4247(96)01434-3