Electrochemical wet etching in KOH:H20 solution and secondary/ion image passive voltage contrast as a complementary technique in failure analysis
Tài liệu tham khảo
Ohtani, 1997, Detection of Gate Oxide Defects Using Electrochemical Wet Etching in KOH:H20[
Beall, 1997, Voltage Contrast Techniques and Procedures, 153
Pearce, 1991