Electrical properties of B-doped polycrystalline silicon thin films prepared by rapid thermal chemical vapour deposition

Thin Solid Films - Tập 497 - Trang 157-162 - 2006
Bin Ai1, Hui Shen1, Zongcun Liang2, Zhi Chen2, Guanglin Kong3, Xianbo Liao3
1Institute for Solar Energy System, Energy Engineering Academy, Sun Yat-Sen University, Guangzhou 510275, PR China
2Solar Energy Laboratory, Guangzhou Institute of Energy Conversion, Chinese Academy of Sciences, Guangzhou 510640, PR China
3State Key Laboratory for Surface Physics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, PR China

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