Effects of growth temperature on performance and stability of zinc oxide thin film transistors fabricated by thermal atomic layer deposition

Thin Solid Films - Tập 562 - Trang 597-602 - 2014
Sung Woon Cho1, Cheol Hyoun Ahn1, Myeong Gu Yun1, So Hee Kim1, Hyung Koun Cho1
1School of Advanced Materials Science and Engineering, Sungkyunkwan University, 2066, Seobu-Ro, Jangan-Gu, Suwon, Gyeonggi-Do 440-746, Republic of Korea

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